ECR ION SOURCE SYSTEM TO EXTRACT MULTI-CHARGED ION BEAM WITH HIGH MAGNETIC FIELD STRUCTURE

摘要

PURPOSE: A high magnetic field ECR(Electron Cyclotron Resonance) ion source system is provided to be applied to various experiments by implementing multi-charged ion beams of various elements using one ion source. CONSTITUTION: An ECR ion source supplies a micro wave by generating ECR plasma. An ECR container receives the ECR ion source. A magnet bundle(14) receives the ECR container and is composed of 6 polar permanent magnet. An electromagnet(13) is formed outside the magnet bundle and forms an axial magnetic field. A high voltage insulation structure is composed of a cylindrical insulation layer between the magnet bundle and the electromagnet. A beam output unit(16) outputs an ion from the ECR ion source.