| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffusion agent composition excellent in coating film formation properties and discharge stability and capable of being applied suitably for a spray coating method, a method of forming an impurity diffusion layer using the diffusion agent composition, and a solar battery. <P>SOLUTION: The diffusion agent composition used for forming an impurity diffusion layer into a semiconductor substrate contains: an impurity diffusion composition (A); a silicon compound (B); and a solvent (C) containing a solvent (C1) having a boiling point of 100°C or less, a solvent (C2) having a boiling point of 120-180°C and a solvent (C3) having a boiling point of 240-300°C. <P>COPYRIGHT: (C)2012,JPO&INPIT |
