| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspection device using an optical cutting method, which is capable of achieving precise inspection by increasing a shutter speed of an area sensor camera. <P>SOLUTION: The visual inspection device includes a carrying means 10 for carrying an inspection object K and a surface shape inspection means for inspecting a surface shape of the inspection object K. The surface shape inspection means includes: a slit light beam irradiation part 23 which irradiates a surface of the inspection object K with a band-shaped slit light beam; an area sensor camera 22 which picks up an image of the slit light beam; a first optical mechanism 30 which receives reflected light of the slit light beam from below in a carrying direction to guide the reflected light to the area sensor camera 22; a second optical mechanism 40 which receives the reflected light from above in the carrying direction to guide the reflected light to the area sensor camera 22; and a shape determination part which determines whether the surface of the inspection object K is proper or not on the basis of two images picked up by the area sensor camera 22. Through respective optical paths of the first optical mechanism 30 and the second optical mechanism 40, images of the reflected light are formed on the area sensor camera 22 side by side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
