发明名称 |
ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE |
摘要 |
The manufacturing of an element structure including two or more sensor element is to be facilitated. An element structure includes a first substrate including a first support layer and a first sensor element disposed on the first support layer and a second substrate including a second support layer and a second sensor element disposed on the second support layer, wherein the second substrate is disposed on the first substrate via a spacer member in a state in which the first sensor element and the second sensor element are disposed to face each other. |
申请公布号 |
US2011290023(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US201113115580 |
申请日期 |
2011.05.25 |
申请人 |
TAKAGI SHIGEKAZU;SEIKO EPSON CORPORATION |
发明人 |
TAKAGI SHIGEKAZU |
分类号 |
G01P15/125;G01P15/08 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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