SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS, A METHOD OF FLATTENING AN EDGE OF A SUBSTRATE AND A DEVICE MANUFACTURING METHOD

摘要

A substrate table to support a substrate is disclosed. The substrate table includes a substrate support to support the substrate and to apply a bending force to an edge of the substrate in a first direction. A substrate edge manipulator is provided that is configured to apply a variable bending force to the edge of the substrate in a second direction, which second direction has at least a component opposite in direction to the first direction.