| 摘要 |
A tracking signal and a focusing signal are stabilized by eliminating multi-layer crosstalk. The diffraction position, with respect to a semiconductor detector, from a center region of a multi-region diffraction grating disposed along the return path of reflection light from the layer of interest is placed further away from the optical axis than the diffraction position from a peripheral part of the diffraction grating. Stray light from other layers is thus prevented from being incident on a sensing region for a peripheral region of the diffraction grating. Further, the area of the semiconductor detector is reduced by dividing the center region. |
