| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve throughput of a substrate conveyance system, by controlling the substrate conveying operation of a conveyance robot to omit or reduce a standby time of the conveyance robot, which conveys substrates and delivers substrates between itself and an In-line Thickness Monitor (ITM). <P>SOLUTION: In a substrate conveyance method for conveying substrates with conveyance robots while one of the robots delivering substrates between itself and an In-line Thickness Monitor (ITM) for measuring thickness of the substrates, the ITM preliminary outputs an end notice signal a predetermined time before the measurement of the thickness of a substrate conveyed inside the ITM being finished, and the conveyance robot is controlled to start the substrate conveyance operation by preliminary receiving the end notice signal output from the ITM. <P>COPYRIGHT: (C)2012,JPO&INPIT |
