| 摘要 |
<P>PROBLEM TO BE SOLVED: To position a galvanomirror with high speed and high accuracy. <P>SOLUTION: A galvano scanner comprises a galvanomirror, an oscillating mechanism, a shaft, a bearing and a semicircular plate. The oscillating mechanism comprises a pair of movable units attached to the front face and the rear face of the semicircular plate and a pair of stator units placed to sandwich the pair of movable units. When the galvanomirror is oscillated through the semicircular plate, the oscillating mechanism maintains the state that the pair of stator units sandwiches the pair of movable units so that the principal direction of magnetic force of a reflection plane between the pair of movable units and the pair of stator units can be parallel to the in-plane direction of the reflection plane and the direction along a rotation axis in order to eliminate the magnetic force of the out-of-plane direction of the reflection plane, and the magnetic force can be cancelled. <P>COPYRIGHT: (C)2012,JPO&INPIT |
