| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray inspector which is capable of detecting foreign matter with a high sensitivity even when X-ray output generated by an X-ray generation part is low. <P>SOLUTION: The X-ray inspector includes: an X-ray generation part 9 which radiates X-rays to an object W to be inspected, which is carried on a carrying line 21; an X-ray detector 10 which has, in a carrying direction (direction X) of the object W to be inspected, a plurality of stages of detecting element arrays 101 to 108 comprising a plurality of detecting elements 101a, 101b, etc., linearly arranged in a main scanning direction (direction Y) orthogonal to the carrying direction on a plane in the carrying direction and synthesizes detection data obtained from respective detecting elements in each stage of the plurality of detecting element arrays 101 to 108 by time delay integration to output synthesized data; and a determination part 44 which determines whether foreign matter exists in the object W to be inspected or not on the basis of the synthesized data outputted from the X-ray detector 10. Furthermore, the X-ray inspector includes a number-of-stages setting part 46 which sets the number of stages of detecting element arrays, which is taken as the object of time delay integration to be performed by the X-ray detector 10, in accordance with thickness information of the object W to be inspected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
