| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chromatic confocal point sensor optical pen capable of improving the S/N ratio of a spectral peak signal. <P>SOLUTION: An opening element for shielding central beam 208 is used for a chromatic confocal point sensor optical pen for chromatic ranging. The opening element for shielding central beam shields with a light shield plate 208B light close to an optical axis, such light passing the chromatic confocal point sensor optical pen in the case of other methods. This increases the average numerical aperture of effective beam of the optical pen, resulting in the reduction of the width of a corresponding spectral peak which the optical pen provides to a spectrometer of a chromatic confocal point sensor system, and the improvement of the whole measurement resolution. <P>COPYRIGHT: (C)2012,JPO&INPIT |
