| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage for laser machining and a laser machining system, capable of laser machining with precision by reducing the deceleration time, non-operating time, and acceleration time when switching the directions of movement of a holder part that holds an object to be processed. <P>SOLUTION: The stage for laser machining comprises a holder part 30, a first upper stage 10 for moving the holder part 30, and a first lower stage 20 for moving the first upper stage 10. When switching the directions of movement of the holder 30 with a fixed position as a reference, a controller 50 relatively moves the first upper stage 10 in the direction after switched by the first lower stage 20 as well as relatively moving the holder part 30 in the direction before switched by the first upper stage 10, or relatively moves the holder part 30 in the direction after switched by the first upper stage 10 as well as relatively moving the first upper stage 10 in the direction before switched by the first lower stage 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
