发明名称 Semiconductor device having pad structure for preventing and buffering stress of silicon nitride film
摘要 A semiconductor device having a pad structure for preventing a stress of a silicon nitride film. The semiconductor device includes a semiconductor substrate, a lower structure formed on the semiconductor substrate, a first insulation film formed on the lower structure, a first metal layer coupled to the lower structure through a first metal contact in the first insulation film, a second metal layer formed on the first metal layer, and a plurality of dummy gates having a concentric square structure formed at the lower portion of the pad region on the second metal layer.
申请公布号 US8067838(B2) 申请公布日期 2011.11.29
申请号 US20070831595 申请日期 2007.07.31
申请人 PARK SUNG KEE;HYNIX SEMICONDUCTOR INC. 发明人 PARK SUNG KEE
分类号 H01L23/52;H01L23/522;H01L21/3205;H01L21/60;H01L23/00;H01L23/485;H01L29/76 主分类号 H01L23/52
代理机构 代理人
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