| 发明名称 |
SUBSTRATE HEATING UNIT |
| 摘要 |
|
| 申请公布号 |
KR101086785(B1) |
申请公布日期 |
2011.11.25 |
| 申请号 |
KR20090051960 |
申请日期 |
2009.06.11 |
| 申请人 |
|
发明人 |
|
| 分类号 |
H01L21/324 |
主分类号 |
H01L21/324 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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