| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology capable of achieving technical request, such that (1) even if a pulling-out voltage is not made larger, high angle current density operation of 1.0 mA/sr or more can be performed, and (2) in addition to (1), an excess current is reduced which causes vacuum degradation, in a well-balanced manner. <P>SOLUTION: An electron source includes a cathode made of tungsten single crystal and a diffusion source provided at the middle part of the cathode. In the electron source, an angle formed by the axial direction of the cathode and a cathode <100> orientation can be adjusted so that electrons discharged from the vicinity of a boundary between the (100) surface and the (110) surface formed at the cathode tip are discharged in substantially parallel to the cathode axis. <P>COPYRIGHT: (C)2012,JPO&INPIT |
