IMPEDANCE MEASURING SENSOR, IMPEDANCE MEASURING DEVICE AND IMPEDANCE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an impedance measuring sensor capable of measuring an abundance of a locally existing liquid with a spatial distribution of high accuracy and measuring even a thin liquid membrane appropriately and highly accurately.

SOLUTION: An impedance measuring sensor comprises: a plurality of electrode pairs 25 having an excitation electrode 21 as one counterpart and a measurement electrode 22 as the other counterpart; a ground region 23 holding electric potential same as reference potential of the excitation electrode 21; and an insulation portion 24 to electrically insulate between the excitation electrode 21, the measurement electrode 22 and the ground region 23. The insulation portion 24 is surrounded by the ground region 23 to form respective insulation regions independently. In each electrode pairs 25, only an insulation region is formed between the excitation electrode 21 and the measurement electrode 22.

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