发明名称 PHOTOMASK FOR COLOR FILTER
摘要 PURPOSE: A photo-mask for manufacturing a color filter is provided to reduce a time and a cost required for color filter manufacturing processes and to increase the aperture ratio of pixels. CONSTITUTION: A photo-mask(M) for manufacturing a color filter includes at least two mask pattern regions corresponding to the color filter region of a transparent substrate. The mask pattern region is a structure(21) in which a plurality of nano-holes(H) of constant diameters and pitches is formed in a light shielding layer. The diameters of the nano holes are between 200 and 450nm. The pitches of adjacent nano holes are between 400 and 900nm.
申请公布号 KR20110126837(A) 申请公布日期 2011.11.24
申请号 KR20100046312 申请日期 2010.05.18
申请人 LG INNOTEK CO., LTD. 发明人 KIM, JONG SUN
分类号 G03F1/00;H01L21/027 主分类号 G03F1/00
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