STAGE HEATER, AND METHOD FOR PRODUCING SHAFT

摘要

PROBLEM TO BE SOLVED: To provide a stage heater capable of suppressing heat transfer from a heating substrate toward a shaft side, and to provide a method for producing a shaft.

SOLUTION: The stage heater comprises: a heating substrate 2 made of aluminum or an alloy including aluminum; and the shaft 5 which is bonded to one side surface of the heating substrate and supports the heating substrate. There is also provided the method for producing the shaft. The shaft 5 comprises: a pipe 6 made of a metal having thermal conductivity lower than the material of the heating substrate; and a bonding layer 7 formed on the side to be bonded to the heating substrate of the pipe by accelerating powder of aluminum or powder of an alloy including aluminum together with a gas and spraying the powder onto the pipe in a solid state as it is to deposit the powder onto the pipe.

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