| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a leakage inspection apparatus capable of implementing a leakage inspection of an inspection target with high accuracy. <P>SOLUTION: The leakage inspection apparatus includes: a closed chamber (2) for accommodating an inspection target (1); a measuring device (3) for measuring the quantity of helium gas in the chamber (2); and a connecting hose (10) for connecting a joint section (5) passing through a wall surface of the chamber (2) with the inspection target (1). The connecting hose (10) constituted by a double pipe consisting of an outer pipe (11) and an inner pipe (12) which have flexibility respectively includes a helium gas supply section (4) for supplying the pressurized helium gas to the inspection target (1) through the joint section and the inner pipe (12) from the outside of the chamber (2). <P>COPYRIGHT: (C)2012,JPO&INPIT |
