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发明名称
摘要
申请公布号
JP4820345(B2)
申请公布日期
2011.11.24
申请号
JP20070222252
申请日期
2007.08.29
申请人
发明人
分类号
H01L21/677;B65G49/07;H01L21/673
主分类号
H01L21/677
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代理人
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地址
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