Method for surface treatment of pumping elements or pump chamber inner walls of vacuum pump, involves flushing pump chamber with dispersion medium which is deposited on pump chamber inner walls or surfaces of pump elements

摘要

The method involves flushing a pump chamber with a dispersion medium. The dispersion medium is deposited on the pump chamber inner walls or surfaces of the pump elements, and is made of a protective layer-forming particle. The particles have average diameter of less than 2 microns. The dispersion medium comprises zinc oxide. A cleaning process is performed before the flushing of the dispersion medium.