| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long dimension measuring device having improved usability. <P>SOLUTION: A long dimension measuring device 1 includes: a sample table 10 for mounting a sample 2 and being fixedly positioned; an illumination unit 20 for illuminating a pattern formed on the sample 2 with illumination light; an imaging unit 30 for imaging an image of the pattern illuminated with the illumination light; a flatness adjustment mechanism 12 for adjusting flatness of the sample table 10 and supporting the sample table 10; an air supply/suction section 16 for supplying air to the sample table 10 and sucking the air from the sample table 10; a suction mechanism 40 for being sucked onto the sample 2 floating above the sample table 10; a Z stage 51 for moving the imaging unit 30 in a Z direction; an X stage 52 for moving the imaging unit 30 in an X direction; a Y stage 53 for moving the sample 2 in a Y direction through the suction mechanism 40; and an interference measuring unit 60 for measuring a distance between two points on the pattern formed on the sample 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
