发明名称 METHOD AND APPARATUS FOR SCREEN PRINTING A MULTIPLE LAYER PATTERN
摘要 <p>Embodiments of the invention generally provide apparatus and methods of screen printing a multiple layer pattern on a substrate. In one embodiment, a first layer of a pattern is printed onto a surface of a substrate along with a plurality of alignment marks. The locations of the alignment marks are measured with respect to a feature of the substrate to determine the actual location of the pattern. The actual location is compared with the expected location to determine the positional error of the pattern placement on the substrate. This information is used to adjust the placement of the next layer of the pattern to be printed onto the first layer for more accurate placement and reduced positional error.</p>
申请公布号 KR20110126721(A) 申请公布日期 2011.11.23
申请号 KR20117022341 申请日期 2009.05.25
申请人 APPLIED MATERIALS, INC. 发明人 BACCINI ANDREA;GALIAZZO MARCO
分类号 B41F15/08;H01L21/68;H01L31/18;H05K3/12 主分类号 B41F15/08
代理机构 代理人
主权项
地址