| 摘要 |
<p>A vacuum processing apparatus having a vacuum chamber includes a gate valve arranged in the vacuum chamber and including a valve body which moves in a direction relative to an exhaust port of the vacuum chamber to open/close the exhaust port, and a driving unit configured to move the valve body, a connecting portion having one end connected to the exhaust port of the vacuum chamber and formed in a direction inclined from a moving direction of the valve body, and an exhaust pump connected to an opposite end of the connecting portion and capable of evacuating an interior of the connecting portion. The driving unit includes (i) a rod serving as a driving shaft which drives the valve body in a direction to close the exhaust port or a direction to open the exhaust port, and (ii) a cylinder driving the rod, and the rod extends parallel to a moving direction of the valve body and supports the valve body at one end. In addition, the connecting portion is connected to the exhaust port of the vacuum chamber in a direction inclined at a predetermined angle from an axial direction of the rod, and the cylinder is arranged outside the connecting portion and connected to an opposite end of the rod.</p> |
