DEFLECTOR OF ELECTRIC BEAM DEVICE HAVING DIRECTION CHANGING ELECTRODE ARRANGED PARALLEL WITH EACH OTHER
摘要
PURPOSE: The deflector of an electron beam device is provided to minimize image distortion by forming an electric field on an electronic beam and converting the progressive direction of the electronic beam. CONSTITUTION: A deflector(300) is composed of a total of 4 direction converting electrodes. A pair of first direction converting electrodes(310) is formed to be long to a longitudinal direction. The pair of the first direction converting electrodes is parallelly arranged at a constant interval and the same height. A pair of second direction converting electrodes(350) is formed to be long to the longitudinal direction while being crossed with the first direction converting electrodes. The pair of the second direction converting electrodes is arranged to be parallel at the constant interval and the same height.
申请公布号
KR20110125982(A)
申请公布日期
2011.11.22
申请号
KR20100045647
申请日期
2010.05.14
申请人
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
发明人
KANG, EUN GOO;CHOI, YOUNG JAE;LEE, SEOK WOO;LEE, DONG YOON