发明名称 Manufacturing method of semiconductor apparatus and semiconductor apparatus
摘要 A first conducting layer is formed on a side of a main surface on which an electrode terminal of a semiconductor device is provided in a semiconductor substrate. The first conducting layer is electrically connected to the electrode terminal of the semiconductor device. A mask layer that has an opening at a predetermined position is formed on the first conducting layer. A second conducting layer is formed inside the opening of the mask layer. The mask layer is removed. A relocation wiring that includes the first conducting layer and electrically draws out the electrode terminal is formed by performing anisotropic etching for the first conducting layer using the second conducting layer as a mask. Finally, a bump is formed on the relocation wiring by causing the second conducting layer to reflow.
申请公布号 US8063487(B2) 申请公布日期 2011.11.22
申请号 US20080335673 申请日期 2008.12.16
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MIGITA TATSUO;EZAWA HIROKAZU;IIJIMA TADASHI;TOGASAKI TAKASHI
分类号 H01L23/48 主分类号 H01L23/48
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