摘要 |
PURPOSE: A spectral device, a detecting device and a manufacturing method of the spectral device are provided to improve wavelength resolution and diffraction efficiency. CONSTITUTION: A spectral device comprises a transmission diffraction grating. The incident light is transmitted in the transmission diffraction grating. The transmission diffraction grating has inclines(140,150). The incline is formed with a first dielectric body. The incline is tilted based on a reference line(130). When the incident angle of the incident light to the transmission diffraction grating is angle-a about a reference line, and the diffraction angle of the diffracted light is an angle-β about the reference line, the incident angle-α is smaller than an bragg angle-&thgr; about an incline, and the incident angle-β is bigger than the angle-&thgr; about an incline.
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