发明名称 Interconnect Structures for Substrate
摘要 A device for use with integrated circuits is provided. The device includes a substrate having a through-substrate via formed therethrough. Dielectric layers are formed over at least one side of the substrate and metallization layers are formed within the dielectric layers. A first metallization layer closest to the through-substrate via is larger than one or more overlying metallization layers. In an embodiment, a top metallization layer is larger than one or more underlying metallization layers. Integrated circuit dies may be attached to the substrate on either or both sides of the substrate, and either side of the substrate may be attached to another substrate, such as a printed circuit board, a high-density interconnect, a packaging substrate, an organic substrate, a laminate substrate, or the like.
申请公布号 US2011278732(A1) 申请公布日期 2011.11.17
申请号 US20100779734 申请日期 2010.05.13
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YU CHEN-HUA;CHIOU WEN-CHIH;JENG SHIN-PUU;WU TSANG-JIUH
分类号 H01L23/522;H01L21/50 主分类号 H01L23/522
代理机构 代理人
主权项
地址