| 摘要 |
A diaphragm pump for achieving reduced pressure ripple of an exhausted gas is provided. The diaphragm pump is a pump for transporting a gas in accordance with change in volume of a pump chamber, and the diaphragm pump includes an exhaust valve permitting flow of the gas that flows out of the pump chamber and prohibiting a flow thereof in a reverse direction, an air chamber in which the gas that has flowed out of the pump chamber through the exhaust valve flows, an exhaust port through which the gas is exhausted to the outside of the diaphragm pump, and a through hole portion for restricting a flow rate of the gas that flows from the air chamber to the exhaust port. |
