发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device comprising a double-gate transistor having an effect of achieving a low channel resistance and increasing an electron field-effect mobility, and a method for manufacturing the same. <P>SOLUTION: The semiconductor device according to the present invention comprises a lower gate electrode; an upper gate electrode on the lower gate electrode; a contact plug interposed between the lower gate electrode and the upper gate electrode and connecting the lower electrode to the upper electrode; and a functional electrode formed separately from the upper gate electrode with a height same as that of the upper gate electrode. According to the present invention, the double gate transistor having high electron field-effect mobility is applied to the semiconductor device, thereby characteristics of the semiconductor device can be improved. According to the present invention, especially, mass-production of the semiconductor device having large area and high image quality can be realized without increasing a process cost and decreasing yields, because it is not necessary to add any mask process and deposition process. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011233889(A) 申请公布日期 2011.11.17
申请号 JP20110095152 申请日期 2011.04.21
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LIU MIN JI;PARK SANG HEE;HWANG CHI SUN;ZHAO KANG YI
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L29/41;H01L29/417;H01L29/423;H01L29/49;H01L51/50;H05B33/08;H05B33/10 主分类号 H01L29/786
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