| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten a processing time to correct a position after movement of a substrate in a breaking process. <P>SOLUTION: A substrate is moved so that a blade is situated in line with a scribe line of the substrate, and the blade is lowered to break the substrate. The blade is raised after the breaking, and the substrate after the breaking is photographed with a camera. Then, the substrate is moved along its surface, while an image processing is concurrently performed. Thus, the breaking time to break a substrate having many scribe lines is shortened. <P>COPYRIGHT: (C)2012,JPO&INPIT |
