| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell that improves conversion efficiency of an integrated tandem type solar cell. <P>SOLUTION: The method of manufacturing the solar cell comprises: forming a transparent electrode 12a on a surface of a substrate 11; forming a plurality of mutually parallel first grooves 201a by irradiating the transparent electrode with laser light; forming an amorphous photoelectric conversion layer 21a on the transparent electrode while closing the first grooves; forming a plurality of masks in parallel with the first groove on a part of the amorphous photoelectric conversion layer except on the first groove; forming a crystalline photoelectric conversion layer 22a on the amorphous photoelectric conversion layer where the masks are not formed; forming a plurality of second grooves 202a parallel with the first grooves by irradiating the amorphous photoelectric conversion layer on which the crystalline photoelectric conversion layer is not formed with laser light from below; forming a back electrode 14a on the amorphous photoelectric conversion layer and crystalline photoelectric conversion layer while closing the second grooves; and forming a plurality of third grooves 203a parallel with the second grooves on the back electrode by irradiating a region where the back electrode is formed directly on the amorphous photoelectric conversion layer except on the second grooves with laser light from below. <P>COPYRIGHT: (C)2012,JPO&INPIT |
