摘要 |
The invention relates to a resonator of the harmonic bulk acoustic resonator IIBAR type, comprising a piezoelectric transducer (6) clamped between two electrodes (4, 8) with a strong electroacoustic coupling, cut according to a first cutting angleΘ1, and an acoustic substrate (10) with a working frequency acoustic quality coefficient at least equal to 5.1012, cut according to a second cutting angleΘ2 with at least one shearing vibration mode. The transducer and the substrate are arranged in such a way that the polarisation direction of the shearing mode of the transducer and the polarisation direction of the shearing of the substrate are aligned, and the second cutting angleΘ2 is such that the temperature coefficient of the frequency of the first order CTFB1 corresponding to the shearing mode and to the second cutting angleΘ2 is zero with inversion of the sign thereof on either side of, or equal to, a bias.
|