发明名称 SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device (A1) includes a semiconductor layer having a first face with a trench (3) formed thereon and a second face to the first face, a gate electrode (41), and a gate insulating layer (5) . The semiconductor layer includes a first n-type semiconductor layer (11), a second n-type semiconductor layer (12), a p-type semiconductor layer (13), and an n-type semiconductor region (14). The trench (3) is formed so as to penetrate through the p-type semiconductor layer (13) and to reach the second n-type semiconductor layer (12). The p-type semiconductor layer (13) includes an extended portion extending to a position closer to the second face of the semiconductor layer than the trench (3) is. Such structure allows suppressing dielectric breakdown in the gate insulating layer (5).
申请公布号 EP2276066(A4) 申请公布日期 2011.11.16
申请号 EP20090724334 申请日期 2009.03.26
申请人 ROHM CO., LTD. 发明人 NAKANO, YUKI
分类号 H01L29/78;H01L21/336;H01L29/12 主分类号 H01L29/78
代理机构 代理人
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