METHOD OF MAKING SILICON NANO WIRES AND METHOD OF FABRICATING RECHARGEABLE LITHIUM BATTERY USING THE SAME

摘要

PURPOSE: A method for manufacturing silicon nanowires and a method for manufacturing a lithium secondary battery using the same are provided to prevent the crack of the silicon nanowires due to the volume expansion of the lithium secondary battery in a charging and discharging process by uniformly maintaining the array and the interval of the silicon nanowires on a cathode collector. CONSTITUTION: A method for manufacturing silicon nanowires(123) includes the following: A catalyst layer(124) including separately arranged metal particles is formed on a silicon layer(121). The catalyst layer forming process uses mask particles which are separately arranged on the silicon layer. The mask particles include a core layer containing the metal particles and a polymer layer surrounding the core layer. The silicon layer in contact with the metal particles is selectively etched through a wet etching process. The metal particles are eliminated to obtain the nanowires.