发明名称 Trap charge equalizing method and threshold voltage distribution reducing method
摘要 A method reduces a threshold voltage distribution in transistors of a semiconductor memory device, where each transistor includes a nitride liner. The method includes injecting electrons into a charge trap inside and outside the nitride liner of the transistors, and partially removing the electrons injected into the charge trap inside and outside the nitride liner to equalize trapped charges in the transistors.
申请公布号 US8058187(B2) 申请公布日期 2011.11.15
申请号 US20100652052 申请日期 2010.01.05
申请人 SONG KI-WHAN;KIM SU-A;SAMSUNG ELECTRONICS CO., LTD. 发明人 SONG KI-WHAN;KIM SU-A
分类号 H01L21/30 主分类号 H01L21/30
代理机构 代理人
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