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发明名称
VERFAHREN ZUM ÄTZEN EINER OPFERSCHICHT AUS SILIZIUMOXID
摘要
申请公布号
AT529378(T)
申请公布日期
2011.11.15
申请号
AT20070789096T
申请日期
2007.08.02
申请人
MEMSSTAR LIMITED
发明人
O'HARA, ANTHONY
分类号
B81C1/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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