| 摘要 |
A reactor for chlorosilane compounds in which a chlorosilane compound feed gas supplied to the inside of a reaction tube can be sufficiently inhibited from permeating the wall of the reaction tube and leaking out. It is a reactor for chlorosilane compounds which includes a carbon reaction tube which has a reaction part extending from the bottom of the tube to a given height and having a silicon deposit on its inner surface and in which a chlorosilane compound and hydrogen are brought into contact with the inner surface with heating to react the chlorosilane. In the reaction tube, the inner surface and/or outer surface of the non-reaction part which is a part located on the upper side of the reaction part has undergone a treatment for gas permeation inhibition, i.e., for inhibiting the chlorosilane compound supplied to the reaction tube from permeating the wall of the non-reaction part of the reaction tube and leaking out.
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