| 摘要 |
An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [Ec], and a plurality of electrodes [E1-E4] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N′] to vibrate in one direction [V] normal to the physical plane of the electrodes [Ec, E1-E4] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S′] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E1-E4], respectively. The circuit [14] typically utilizes an automatic gain control and two operational amplifiers, and may include various signal conditioning components and a separate tuning module. |
