ESD APPARATUS AND METHOD OF INK CIRCULATION MECHANISM AND INK JET PRINT HEAD USING SAME

摘要

PURPOSE: An ink-circulation type ESD(Electrostatic Spray Deposition) apparatus and method and an ink jet print head using the same are provided to enable precise printing by reducing the remaining meniscus after spray in order to form fine ink droplets. CONSTITUTION: An ink circulation method of an ink-circulation type ESD apparatus is as follows. Ink is injected into an inlet port(113) of an outer capillary(110). Meniscus is formed in the outer capillary and ink droplets are sprayed to a wafer(W), wherein a part of the meniscus is sucked through an outlet port(123) of an inner capillary(120). The sucked meniscus is injected into the inlet port through a delivery unit(P).