发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting device capable of detecting the reference position of a cutting blade with a simple structure. <P>SOLUTION: The cutting device includes a chuck table having a holding surface for holding a workpiece, a cutting means having a spindle for rotatably supporting the cutting blade for cutting the workpiece held by the chuck table, and a blade detection means for detecting the height position of the lower end part of the cutting blade. The blade detection means is equipped with a pressure sensor which detects wind pressure generated by the airflow around the rotating cutting blade and outputs voltage according to the wind pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011224720(A) 申请公布日期 2011.11.10
申请号 JP20100096819 申请日期 2010.04.20
申请人 DISCO CORP 发明人 FUJIMOTO MASAYOSHI
分类号 B24B49/10;B24B27/06;H01L21/301 主分类号 B24B49/10
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