| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent, in a plasma processing apparatus, corrosion of a lower end part of an inner electrode in an arrangement of three or more electrodes, which is caused by corrosive components generated from surface discharge. <P>SOLUTION: Three or more plate-shaped electrodes 21 are arranged. A discharge generation surface 27 of each electrode 21 is covered with a dielectric member 30, which consists of a plate-shaped solid dielectric. A purge gas is injected from a purge nozzle 70 provided on the side part of the electrode 21. The purge gas flows along the bottom end faces of inner electrodes 21B, 21C, and 21D. <P>COPYRIGHT: (C)2012,JPO&INPIT |
