| 摘要 |
<P>PROBLEM TO BE SOLVED: To establish a simpler inspection method with which no prober in wiring is required and to provide a inspection device using the inspection method. <P>SOLUTION: In an inspection method, electromotive force is generated in wiring of element substrate through electromagnetic induction, thereby conducting current in the wiring to perform inspection. Through application of voltage on the circuit or circuit elements in a noncontact manner, the circuit or circuit elements are operated. The voltage output by the circuit or circuit elements is read in a noncontact manner, thereby determining the quality of the circuit or circuit elements. <P>COPYRIGHT: (C)2012,JPO&INPIT |
