| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer viewer system for graphical presentation and analysis of a wafer and the wafer series. <P>SOLUTION: A wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer to be analyzed, performing analysis on the selected regions of the wafer, and displaying results of the analysis. <P>COPYRIGHT: (C)2012,JPO&INPIT |
