| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the efficiency of energy conversion. <P>SOLUTION: An apparatus 1 that generates extreme ultraviolet rays by generating a spread target PP by irradiating a target substance with a pre-pulse laser beam L1, turning the spread target PP into a plasma by irradiating it with a main laser beam L2 and outputting an extreme ultraviolet ray L3 radiated from the plasma PR is provided with one or the other, or both, of a first polarization control unit 10 that controls the polarized state of the pre-pulse laser beam L1 and a second polarization control unit 610 that controls the polarized state of the main pulse laser beam L2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
