| 发明名称 |
METHOD AND APPARATUS FOR MANUFACTURING A RESONATING STRUCTURE |
| 摘要 |
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating environmental changes.
|
| 申请公布号 |
US2011273061(A1) |
申请公布日期 |
2011.11.10 |
| 申请号 |
US201113186428 |
申请日期 |
2011.07.19 |
| 申请人 |
SAND9, INC. |
发明人 |
THALMAYR FLORIAN;KUYPERS JAN H.;SCHOEPF KLAUS JUERGEN |
| 分类号 |
H01L41/04 |
主分类号 |
H01L41/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
