| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scanner of piezoelectric drive-type having a overall size which is smaller than a size of a conventional mirror portion, and a manufacturing method therefor. <P>SOLUTION: The optical scanner comprises a mirror portion 2 for reflecting a light beam, movable support bodies 3A to 3D having piezoelectric elements for functioning as a piezoelectric drive portion, and a fixing frame portion 4 surrounding the movable support bodies 3A to 3D. In this optical scanner, torsion bars 5, 6 couple the mirror portion 2 and inner corner portions of end portions adjacent to each other of the movable support bodies 3A to 3D, and the torsion bars 5, 6 pivot the mirror portion 2 inside of the movable support bodies 3A to 3D. Coupling portions 7A to 7D axially orthogonal to the torsion bars 5, 6 have a torsion-bar function to couple the fixing frame portion 4 and respective outer corner portions diagonally opposed to the inner corner portions of the movable support bodies 3A to 3D, and the coupling portions 7A to 7D pivot the movable support bodies 3A to 3D inside of the fixing frame portion 4. In this configuration, the optical scanner applies a driving signal to the piezoelectric elements so as to oscillatingly drive the mirror portion 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
