| 发明名称 |
NEGATIVELY CHARGED PASSIVATION LAYER IN A PHOTOVOLTAIC CELL |
| 摘要 |
<p>Embodiments of the invention are directed to methods and apparatus for processing of a solar substrate for making a photovoltaic device. In particular, methods and apparatus for creating a negatively charged passivation layer by are provided.</p> |
| 申请公布号 |
KR20110122174(A) |
申请公布日期 |
2011.11.09 |
| 申请号 |
KR20117020699 |
申请日期 |
2010.02.05 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BORDEN PETER G.;OLSEN CHRISTOPHER S. |
| 分类号 |
H01L31/042;H01L31/0216;H01L31/18 |
主分类号 |
H01L31/042 |
| 代理机构 |
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代理人 |
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