| 摘要 |
A MOCVD device (shape measurement device) of the present invention measure including the shape of a measurement object with use of a mobile platform (rotating table) for moving a substrate, that is, the measurement object, velocity measuring means (21) utilizing the Doppler effect of a laser beam, measurement object detecting means (25), arithmetic processing means (24), and storing means. The arithmetic processing means (24) includes: measurement object velocity extracting means (24a) for extracting the velocity of a measurement object; velocity average calculating means (24b) for calculating a velocity mean value from velocity data; subtracting means (24c) for subtracting the velocity mean value from the velocity data; and adding means (24d) for integrating the velocity. |
