PLASMA GENERATION APPARATUS AND TRANSFORMER

摘要

PURPOSE: A plasma generating apparatus and a transformer are provided to generate the symmetric plasma of high density by serially and/or parallely combining CCP(Capacitively Coupled Plasma) with ICP(Inductively Coupled Plasma) in various types. CONSTITUTION: A plasma generating apparatus comprises an internal antenna(122) which is inserted in a plasma chamber(101) and a transformer(110) which supplies power to the internal antenna. The transformer includes a center conducting wire(114) and a plurality of coaxial cables which includes the cladding conducting wires(112) surrounding the center conducting wire. One end of the center conducting wire is connected to RF power(132). The other end of the center conducting wire is grounded. The cladding conducting wires are serially connected each other. The internal antenna is connected to one end of the center conducting wire and the cladding conducting wires. The plasma chamber includes a lid(102) and a cylindrical chamber(104).