发明名称 Silicon carbide semiconductor device and method for manufacturing the same
摘要 A channel layer (40) for forming a portion of a carrier path between a source electrode (100) and a drain electrode (110) is formed on a drift layer (30). The channel layer (40) includes Ge granular crystals formed on the drift layer (30), and a cap layer covering the Ge granular crystals.
申请公布号 US8053784(B2) 申请公布日期 2011.11.08
申请号 US20070376362 申请日期 2007.08.07
申请人 TOYOTA JIDOSHA KABUSHIKI KAISHA;JAPAN FINE CERAMICS CENTER 发明人 SEKI AKINORI;TANI YUKARI;SHIBATA NORIYOSHI
分类号 H01L29/15 主分类号 H01L29/15
代理机构 代理人
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